Epitaxial GeSn: impact of process conditions on material quality

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Authors
Loo, Roger; Shimura, Yosuke; Ike, Shinichi; Vohra, Anurag; Stoica, Toma; Buca, Dan; Kohen, David; Margetis, Joe; Tolle, John
Conference
Joint ISTDM/ICSI Conference
Title
Epitaxial GeSn: impact of process conditions on material quality
Publication type
Meeting abstract
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