Show simple item record

Unbiased roughness measurements: Subtracting out SEM effects

dc.contributor.authorLorusso, Gian
dc.contributor.authorRutigliani, Vito
dc.contributor.authorVan Roey, Frieda
dc.contributor.authorMack, Chris
dc.date.accessioned2021-10-25T22:32:56Z
dc.date.available2021-10-25T22:32:56Z
dc.date.issued2018
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31239
dc.sourceIIOimport
dc.titleUnbiased roughness measurements: Subtracting out SEM effects
dc.typeJournal article
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorVan Roey, Frieda
dc.source.peerreviewyes
dc.source.beginpage33
dc.source.endpage37
dc.source.journalMicroelectronic Engineering
dc.source.volume190
dc.identifier.urlhttps://www.sciencedirect.com/science/article/abs/pii/S0167931718300169
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record