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Articles
Unbiased roughness measurements: Subtracting out SEM effects
Publication:
Unbiased roughness measurements: Subtracting out SEM effects
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Date
2018
Journal article
https://doi.org/10.1016/j.mee.2018.01.010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lorusso, Gian
;
Rutigliani, Vito
;
Van Roey, Frieda
;
Mack, Chris
Journal
Microelectronic Engineering
Abstract
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Acq. date: 2025-12-10
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Views
1980
since deposited on 2021-10-25
3
last month
3
last week
Acq. date: 2025-12-10
Citations