Unbiased roughness measurements: Subtracting out SEM effects

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Authors
Lorusso, Gian; Rutigliani, Vito; Van Roey, Frieda; Mack, Chris
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
190
Title
Unbiased roughness measurements: Subtracting out SEM effects
Publication type
Journal article
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