Publication:
Unbiased roughness measurements: Subtracting out SEM effects
Date
| dc.contributor.author | Lorusso, Gian | |
| dc.contributor.author | Rutigliani, Vito | |
| dc.contributor.author | Van Roey, Frieda | |
| dc.contributor.author | Mack, Chris | |
| dc.contributor.imecauthor | Lorusso, Gian | |
| dc.contributor.imecauthor | Van Roey, Frieda | |
| dc.date.accessioned | 2021-10-25T22:32:56Z | |
| dc.date.available | 2021-10-25T22:32:56Z | |
| dc.date.issued | 2018 | |
| dc.identifier.issn | 0167-9317 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31239 | |
| dc.identifier.url | https://www.sciencedirect.com/science/article/abs/pii/S0167931718300169 | |
| dc.source.beginpage | 33 | |
| dc.source.endpage | 37 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 190 | |
| dc.title | Unbiased roughness measurements: Subtracting out SEM effects | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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