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Unbiased roughness measurements: Subtracting out SEM effects, Part 2

dc.contributor.authorLorusso, Gian
dc.contributor.authorRutigliani, Vito
dc.contributor.authorVan Roey, Frieda
dc.contributor.authorMack, Chris
dc.date.accessioned2021-10-25T22:33:25Z
dc.date.available2021-10-25T22:33:25Z
dc.date.issued2018
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31240
dc.sourceIIOimport
dc.titleUnbiased roughness measurements: Subtracting out SEM effects, Part 2
dc.typeJournal article
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorVan Roey, Frieda
dc.source.peerreviewyes
dc.source.beginpage06J501
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue6
dc.source.volume36
imec.availabilityPublished - imec


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