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Articles
Unbiased roughness measurements: Subtracting out SEM effects, Part 2
Publication:
Unbiased roughness measurements: Subtracting out SEM effects, Part 2
Date
2018
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lorusso, Gian
;
Rutigliani, Vito
;
Van Roey, Frieda
;
Mack, Chris
Journal
Journal of Vacuum Science and Technology B
Abstract
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1979
since deposited on 2021-10-25
Acq. date: 2025-10-23
Citations
Metrics
Views
1979
since deposited on 2021-10-25
Acq. date: 2025-10-23
Citations