Unbiased roughness measurements: Subtracting out SEM effects, Part 2

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Authors

Lorusso, Gian; Rutigliani, Vito; Van Roey, Frieda; Mack, Chris

ISSN

1071-1023

Issue

6

Journal

Journal of Vacuum Science and Technology B

Volume

36

Title

Unbiased roughness measurements: Subtracting out SEM effects, Part 2

Publication type

Journal article

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