Publication:
Unbiased roughness measurements: Subtracting out SEM effects, Part 2
Date
| dc.contributor.author | Lorusso, Gian | |
| dc.contributor.author | Rutigliani, Vito | |
| dc.contributor.author | Van Roey, Frieda | |
| dc.contributor.author | Mack, Chris | |
| dc.contributor.imecauthor | Lorusso, Gian | |
| dc.contributor.imecauthor | Van Roey, Frieda | |
| dc.date.accessioned | 2021-10-25T22:33:25Z | |
| dc.date.available | 2021-10-25T22:33:25Z | |
| dc.date.issued | 2018 | |
| dc.identifier.issn | 1071-1023 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31240 | |
| dc.source.beginpage | 06J501 | |
| dc.source.issue | 6 | |
| dc.source.journal | Journal of Vacuum Science and Technology B | |
| dc.source.volume | 36 | |
| dc.title | Unbiased roughness measurements: Subtracting out SEM effects, Part 2 | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |