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Ni-Al alloys as alternative EUV mask absorber

dc.contributor.authorLuong, Vu
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorHendrickx, Eric
dc.contributor.authorOpsomer, Karl
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorLaubis, Christian
dc.contributor.authorScholze, Frank
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-25T22:38:18Z
dc.date.available2021-10-25T22:38:18Z
dc.date.issued2018
dc.identifier.issn2076-3417
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31249
dc.sourceIIOimport
dc.titleNi-Al alloys as alternative EUV mask absorber
dc.typeJournal article
dc.contributor.imecauthorLuong, Vu
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.source.peerreviewyes
dc.source.beginpage521
dc.source.journalApplied Sciences
dc.source.issue4
dc.source.volume8
dc.identifier.urlhttp://www.mdpi.com/2076-3417/8/4/521
imec.availabilityPublished - imec


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