Ni-Al alloys as alternative EUV mask absorber

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Authors

Luong, Vu; Philipsen, Vicky; Hendrickx, Eric; Opsomer, Karl; Detavernier, Christophe; Laubis, Christian; Scholze, Frank; Heyns, Marc

ISSN

2076-3417

Issue

4

Journal

Applied Sciences

Volume

8

Title

Ni-Al alloys as alternative EUV mask absorber

Publication type

Journal article

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