Publication:

Ni-Al alloys as alternative EUV mask absorber

Date

2018

Journal article

Simple item page Full metadata Statistics

Author(s)

;

Philipsen, Vicky

;

Hendrickx, Eric

;

;

Detavernier, Christophe

;

Laubis, Christian

;

;

Journal

Applied Sciences

Statistics

1980 since deposited on 2021-10-25

Acq. date: 2026-02-24