Gallium-doped SiGe and Ge via MO-RPCVD epitaxy

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Authors
Margetis, Joe; Porret, Clément; Kumar, Raj; Petersen Barbosa Lima, Lucas; Kohen, David; Loo, Roger; Tolle, John
Conference
1st Joint ISTDM/ICSI conference
Title
Gallium-doped SiGe and Ge via MO-RPCVD epitaxy
Publication type
Meeting abstract
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