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Monte Carlo simulation of the formation of M2+ - molecular ions sputtered from metallic materials

dc.contributor.authorVlekken, J.
dc.contributor.authorWu, Ting-Di
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorKnuyt, G.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDe Schepper, Luc
dc.date.accessioned2021-10-01T09:41:05Z
dc.date.available2021-10-01T09:41:05Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3131
dc.sourceIIOimport
dc.titleMonte Carlo simulation of the formation of M2+ - molecular ions sputtered from metallic materials
dc.typeProceedings paper
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage895
dc.source.endpage898
dc.source.conferenceSIMS XI - Secondary Ion Mass Spectrometry
dc.source.conferencedate8/09/1997
dc.source.conferencelocationOrlando, FL USA
imec.availabilityPublished - open access


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