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High-sensitivity Rutherford backscattering spectrometry using multi-detector digital pulse processing

dc.contributor.authorMeersschaut, Johan
dc.contributor.authorLaricchiuta, Grazia
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-25T23:16:58Z
dc.date.available2021-10-25T23:16:58Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31322
dc.sourceIIOimport
dc.titleHigh-sensitivity Rutherford backscattering spectrometry using multi-detector digital pulse processing
dc.typeMeeting abstract
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.source.peerreviewyes
dc.source.conferenceHRDP9 - International workshop on High Resolution Depth Profiling
dc.source.conferencedate24/06/2018
dc.source.conferencelocationUppsala Sweden
imec.availabilityPublished - imec


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