dc.contributor.author | Vos, Rita | |
dc.contributor.author | Meuris, Marc | |
dc.contributor.author | Mertens, Paul | |
dc.contributor.author | Heyns, Marc | |
dc.contributor.author | Hatcher, Z. | |
dc.date.accessioned | 2021-10-01T09:41:59Z | |
dc.date.available | 2021-10-01T09:41:59Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3134 | |
dc.source | IIOimport | |
dc.title | Corrosion of aluminum alloys during drying of metallized wafers | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vos, Rita | |
dc.contributor.imecauthor | Meuris, Marc | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 569 | |
dc.source.endpage | 578 | |
dc.source.conference | Proceedings of the 5th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing | |
dc.source.conferencedate | 31/08/1997 | |
dc.source.conferencelocation | Paris France | |
imec.availability | Published - open access | |
imec.internalnotes | Electrochemical Society Proceedings; Vol. 97-35 | |