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Towards accurate composition analysis of GaN and AlGaN using Atom Probe Tomography

dc.contributor.authorMorris, Richard
dc.contributor.authorCuduvally, Ramya
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorZhao, Ming
dc.contributor.authorArnoldi, Laurent
dc.contributor.authorvan der Heide, Paul
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-25T23:45:03Z
dc.date.available2021-10-25T23:45:03Z
dc.date.issued2018
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31374
dc.sourceIIOimport
dc.titleTowards accurate composition analysis of GaN and AlGaN using Atom Probe Tomography
dc.typeJournal article
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorCuduvally, Ramya
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorZhao, Ming
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecZhao, Ming::0000-0002-0856-851X
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.source.peerreviewyes
dc.source.beginpage03F130
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue3
dc.source.volume36
dc.identifier.urlhttps://avs.scitation.org/doi/full/10.1116/1.5019693
imec.availabilityPublished - imec


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