Towards accurate composition analysis of GaN and AlGaN using Atom Probe Tomography

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Authors

Morris, Richard; Cuduvally, Ramya; Melkonyan, Davit; Fleischmann, Claudia; Zhao, Ming; Arnoldi, Laurent; van der Heide, Paul; Vandervorst, Wilfried

ISSN

1071-1023

Issue

3

Journal

Journal of Vacuum Science and Technology B

Volume

36

Title

Towards accurate composition analysis of GaN and AlGaN using Atom Probe Tomography

Publication type

Journal article

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