Publication:

Towards accurate composition analysis of GaN and AlGaN using Atom Probe Tomography

Date

2018
Journal article
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dc.contributor.authorMorris, Richard
dc.contributor.authorCuduvally, Ramya
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorZhao, Ming
dc.contributor.authorArnoldi, Laurent
dc.contributor.authorvan der Heide, Paul
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorCuduvally, Ramya
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorZhao, Ming
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecZhao, Ming::0000-0002-0856-851X
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.date.accessioned2021-10-25T23:45:03Z
dc.date.available2021-10-25T23:45:03Z
dc.date.issued2018
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31374
dc.identifier.urlhttps://avs.scitation.org/doi/full/10.1116/1.5019693
dc.source.beginpage03F130
dc.source.issue3
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume36
dc.title

Towards accurate composition analysis of GaN and AlGaN using Atom Probe Tomography

dc.typeJournal article
dspace.entity.typePublication
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