Towards accurate composition analysis of GaN and AlGaN using Atom Probe Tomography

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Author(s)

Morris, Richard

;

Cuduvally, Ramya

;

Melkonyan, Davit

;

Fleischmann, Claudia

;

;

Arnoldi, Laurent

;

van der Heide, Paul

;

Vandervorst, Wilfried

Journal

Journal of Vacuum Science and Technology B

Metrics

1920 since deposited on 2021-10-25

Acq. date: 2025-10-27