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Exploiting energy sequencing of low energy SIMS to determine intrinsic chemical profiles with sub-nm precision

dc.contributor.authorMorris, Richard
dc.contributor.authorHase, Thomas
dc.date.accessioned2021-10-25T23:46:37Z
dc.date.available2021-10-25T23:46:37Z
dc.date.issued2018
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31377
dc.sourceIIOimport
dc.titleExploiting energy sequencing of low energy SIMS to determine intrinsic chemical profiles with sub-nm precision
dc.typeJournal article
dc.contributor.imecauthorMorris, Richard
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.source.peerreviewyes
dc.source.beginpage03F125
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue3
dc.source.volume36
imec.availabilityPublished - imec


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