Publication:
Mitigation of UV-induced propagation loss in PECVD slicon nitride photonic waveguides
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Acq. date: 2025-12-16
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Acq. date: 2025-12-16
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2 since deposited on 2021-10-26
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1911 since deposited on 2021-10-26
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Acq. date: 2025-12-16
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