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Mitigation of UV-induced propagation loss in PECVD slicon nitride photonic waveguides

dc.contributor.authorNeutens, Pieter
dc.contributor.authorRutowska, Monika
dc.contributor.authorVan Roy, Wim
dc.contributor.authorJansen, Roelof
dc.contributor.authorBuja, Federico
dc.contributor.authorVan Dorpe, Pol
dc.date.accessioned2021-10-26T00:04:46Z
dc.date.available2021-10-26T00:04:46Z
dc.date.issued2018
dc.identifier.issn2330-4022
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31410
dc.sourceIIOimport
dc.titleMitigation of UV-induced propagation loss in PECVD slicon nitride photonic waveguides
dc.typeJournal article
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.imecauthorVan Roy, Wim
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorVan Dorpe, Pol
dc.contributor.orcidimecVan Roy, Wim::0000-0003-3232-1987
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecVan Dorpe, Pol::0000-0003-0918-1664
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2145
dc.source.endpage2150
dc.source.journalACS Photonics
dc.source.issue6
dc.source.volume5
dc.identifier.urlhttps://pubs.acs.org/doi/abs/10.1021/acsphotonics.8b00014
imec.availabilityPublished - imec


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