Influence of UV light on PECVD silicon nitride waveguide propagation loss

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Authors
Neutens, Pieter; Rutowska, Monika; Van Roy, Wim; Jansen, Roelof; Buja, Federico; Van Dorpe, Pol
Conference
2018 IEEE 15th International Conference on Group IV Photonics - GFP
Title
Influence of UV light on PECVD silicon nitride waveguide propagation loss
Publication type
Proceedings paper
Embargo date
9999-12-31
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