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Raman stress measurements at the nanoscale

dc.contributor.authorNuytten, Thomas
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorAslam, Imran
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorEneman, Geert
dc.contributor.authorHantschel, Thomas
dc.contributor.authorSchulze, Andreas
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorvan der Heide, Paul
dc.date.accessioned2021-10-26T00:17:08Z
dc.date.available2021-10-26T00:17:08Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31433
dc.sourceIIOimport
dc.titleRaman stress measurements at the nanoscale
dc.typeProceedings paper
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage311
dc.source.endpage320
dc.source.conferenceSiGe, Ge, and Related Materials: Materials, Processing, and Devices 8
dc.source.conferencedate30/09/2018
dc.source.conferencelocationCancun Mexico
dc.identifier.urlhttp://ecst.ecsdl.org/content/86/7/311.abstract
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 86, Issue 7


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