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Precise measurement of thin-film thickness in 3D-NAND device with CD-SEM

dc.contributor.authorOhashi, Takeyoshi
dc.contributor.authorYamaguchi, Atsuko
dc.contributor.authorHasumi, Kazuhisa
dc.contributor.authorIkota, Masami
dc.contributor.authorLorusso, Gian
dc.contributor.authorTan, Chi Lim
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorFurnemont, Arnaud
dc.date.accessioned2021-10-26T00:23:21Z
dc.date.available2021-10-26T00:23:21Z
dc.date.issued2018
dc.identifier.issn1932-5150
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31444
dc.sourceIIOimport
dc.titlePrecise measurement of thin-film thickness in 3D-NAND device with CD-SEM
dc.typeJournal article
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage24002
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.issue2
dc.source.volume17
dc.identifier.urlhttps://www.spiedigitallibrary.org/journals/Journal-of-MicroNanolithography-MEMS-and-MOEMS/volume-17/issue-2/024002/Precise-meas
imec.availabilityPublished - open access


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