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RMG patterning by digital wet etching of polycrystalline metal films
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Authors
Oniki, Yusuke
;
Vereecke, Guy
;
Dentoni Litta, Eugenio
;
Ragnarsson, Lars-Ake
;
Dekkers, Harold
;
Schram, Tom
;
Holsteyns, Frank
;
Horiguchi, Naoto
Conference
Ultra Clean Processing of Semiconductor Surfaces XIV - UCPSS
Title
RMG patterning by digital wet etching of polycrystalline metal films
Publication type
Proceedings paper
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