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Improving APT-AFM technology: towards high resolution 3D APT tip shapes

dc.contributor.authorOp de Beeck, Jonathan
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorParedis, Kristof
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-26T00:25:39Z
dc.date.available2021-10-26T00:25:39Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31448
dc.sourceIIOimport
dc.titleImproving APT-AFM technology: towards high resolution 3D APT tip shapes
dc.typeMeeting abstract
dc.contributor.imecauthorOp de Beeck, Jonathan
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecOp de Beeck, Jonathan::0000-0003-3471-2156
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.source.peerreviewyes
dc.source.conferenceAtom Probe Tomography and Microscopy - APT&M
dc.source.conferencedate10/06/2018
dc.source.conferencelocationGaithersburg, MD USA
imec.availabilityPublished - imec


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