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The impact of Focused Ion Beam (FIB) induced electrical damage on electrical characterization

dc.contributor.authorPandey, Komal
dc.contributor.authorParedis, Kristof
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-26T00:40:01Z
dc.date.available2021-10-26T00:40:01Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31473
dc.sourceIIOimport
dc.titleThe impact of Focused Ion Beam (FIB) induced electrical damage on electrical characterization
dc.typeMeeting abstract
dc.contributor.imecauthorPandey, Komal
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.source.peerreviewno
dc.source.beginpageI.15.2
dc.source.conferenceEuropean Materials Research Society Spring Meeting Symposium I: Materials Research for Group IV Semiconductors: Growth, Characte
dc.source.conferencedate18/06/2018
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


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