Publication:

Direct metal etch for advanced interconnect

Date

2018

Journal article

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Files

38378.pdf 2.45 MB

Author(s)

;

;

Lazzarino, Frederic

;

Rassoul, Nouredine

;

;

Journal

Journal of Vacuum Science and Technology B

Statistics

2049 since deposited on 2021-10-26

2last month

Acq. date: 2026-09-16