dc.contributor.author | Paredis, Kristof | |
dc.date.accessioned | 2021-10-26T00:48:09Z | |
dc.date.available | 2021-10-26T00:48:09Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31486 | |
dc.source | IIOimport | |
dc.title | Scanning probe microscopy for future semiconductor devices | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Paredis, Kristof | |
dc.contributor.orcidimec | Paredis, Kristof::0000-0002-5163-4164 | |
dc.source.peerreview | no | |
dc.source.conference | 2018 NanoScientific Forum Europe | |
dc.source.conferencedate | 10/10/2018 | |
dc.source.conferencelocation | Freiberg Germany | |
dc.identifier.url | https://www.parksystems.com/images/events/symposium/NSFE_Program_short.pdf | |
imec.availability | Published - imec | |