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Post processing of a SiNy-based photonic stack above a CMOS imager sensor

dc.contributor.authorPham, Nga
dc.contributor.authorTyagi, Hemant Kumar
dc.contributor.authorDu Bois, Bert
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorWinderickx, Gillis
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-26T01:09:13Z
dc.date.available2021-10-26T01:09:13Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31522
dc.sourceIIOimport
dc.titlePost processing of a SiNy-based photonic stack above a CMOS imager sensor
dc.typeProceedings paper
dc.contributor.imecauthorPham, Nga
dc.contributor.imecauthorTyagi, Hemant Kumar
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorWinderickx, Gillis
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage50
dc.source.endpage54
dc.source.conference2018 IEEE 20th Electronics Packaging Technology Conference (EPTC)
dc.source.conferencedate4/12/2018
dc.source.conferencelocationSingapore Singapore
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8654381
imec.availabilityPublished - open access


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