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Wet-chemical deposition of alternative metals

dc.contributor.authorPhilipsen, Harold
dc.contributor.authorMonnens, Wouter
dc.contributor.authorGnocchi, Luca
dc.contributor.authorPedrali, Marco
dc.contributor.authorBerthuit, Theo
dc.contributor.authorImhof, Edward
dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-26T01:10:53Z
dc.date.available2021-10-26T01:10:53Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31525
dc.sourceIIOimport
dc.titleWet-chemical deposition of alternative metals
dc.typeMeeting abstract
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.beginpage04MALD
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM
dc.source.conferencedate18/03/2018
dc.source.conferencelocationMilano Italy
dc.identifier.urlhttp://mam2018.mdm.imm.cnr.it/MAM2018.pdf
imec.availabilityPublished - imec


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