Wet-chemical etching of ruthenium in acidic Ce4+ solution

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Authors
Philipsen, Harold; Teck, Sander; Mouwen, Nils; Monnens, Wouter; Le, Quoc Toan
Conference
Ultra Clean Processing of Semiconductor Surafces XIV - UCPSS
Title
Wet-chemical etching of ruthenium in acidic Ce4+ solution
Publication type
Proceedings paper
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