Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Wet-chemical etching of ruthenium in acidic Ce4+ solution
Publication:
Wet-chemical etching of ruthenium in acidic Ce4+ solution
Date
2018
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Philipsen, Harold
;
Teck, Sander
;
Mouwen, Nils
;
Monnens, Wouter
;
Le, Quoc Toan
Journal
Abstract
Description
Metrics
Views
1875
since deposited on 2021-10-26
417
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1875
since deposited on 2021-10-26
417
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations