Authors

Porret, Clément; Hikavyy, Andriy; Gomez Granados, Juan Fernando; Baudot, Sylvain; Vohra, Anurag; Kunert, Bernardette; Douhard, Bastien; Bogdanowicz, Janusz; Schaekers, Marc; Kohen, David; Margetis, Joe; Tolle, John; Petersen Barbosa Lima, Lucas; Sammak, Amir; Scappucci, Giordano; Rosseel, Erik; Langer, Robert; Loo, Roger

Conference

SiGe, Ge, and Related Materials: Materials, Processing, and Devices 8

Title

Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration

Publication type

Proceedings paper