Show simple item record

New sensitive electrical measurement techniques for the study of stress induced voiding

dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorBender, Hugo
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-01T09:48:26Z
dc.date.available2021-10-01T09:48:26Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3156
dc.sourceIIOimport
dc.titleNew sensitive electrical measurement techniques for the study of stress induced voiding
dc.typeProceedings paper
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage279
dc.source.endpage285
dc.source.conferenceAdvanced Metallization and Interconnect Systems for ULSI Applications in 1997
dc.source.conferencedate30/09/1997
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Conference Proceedings; Vol. ULSI XII


Files in this item

Thumbnail
Name:
2601.pdf
Size:
1.344Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record