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Characterization of optical end-point detection for via reveal processing

dc.contributor.authorRassoul, Nouredine
dc.contributor.authorJourdain, Anne
dc.contributor.authorTutunjyan, Nina
dc.contributor.authorDe Vos, Joeri
dc.contributor.authorSardo, Stefano
dc.contributor.authorPiumi, Daniele
dc.contributor.authorMiller, Andy
dc.contributor.authorBeyne, Eric
dc.contributor.authorWalsby, Edward
dc.contributor.authorAshraf, Huma
dc.contributor.authorThomas, Dave
dc.date.accessioned2021-10-26T02:13:53Z
dc.date.available2021-10-26T02:13:53Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31628
dc.sourceIIOimport
dc.titleCharacterization of optical end-point detection for via reveal processing
dc.typeProceedings paper
dc.contributor.imecauthorRassoul, Nouredine
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorTutunjyan, Nina
dc.contributor.imecauthorDe Vos, Joeri
dc.contributor.imecauthorSardo, Stefano
dc.contributor.imecauthorPiumi, Daniele
dc.contributor.imecauthorMiller, Andy
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorWalsby, Edward
dc.contributor.orcidimecRassoul, Nouredine::0000-0001-9489-3396
dc.contributor.orcidimecDe Vos, Joeri::0000-0002-9332-9336
dc.contributor.orcidimecSardo, Stefano::0000-0002-9302-8007
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1181
dc.source.endpage1187
dc.source.conferenceIEEE 68th Electronic Components and Technology Conference - ECTC
dc.source.conferencedate29/05/2018
dc.source.conferencelocationSan Diego, CA USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8429695
imec.availabilityPublished - open access


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