dc.contributor.author | Redzheb, Murad | |
dc.contributor.author | Pasquali, Mattia | |
dc.contributor.author | Armini, Silvia | |
dc.date.accessioned | 2021-10-26T02:26:36Z | |
dc.date.available | 2021-10-26T02:26:36Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31647 | |
dc.source | IIOimport | |
dc.title | Area-selective deposition of low-k materials by means of the sol-gel method | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Pasquali, Mattia | |
dc.contributor.imecauthor | Armini, Silvia | |
dc.contributor.orcidimec | Pasquali, Mattia::0000-0002-1309-1082 | |
dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | O6SALD | |
dc.source.conference | Materials for Advanced Metallizaiton Conference - MAM | |
dc.source.conferencedate | 18/03/2018 | |
dc.source.conferencelocation | Milano Italy | |
dc.identifier.url | http://mam2018.mdm.imm.cnr.it/MAM2018.pdf | |
imec.availability | Published - open access | |