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Fast analytical model of MZI micro-opto-mechanical pressure sensor
Publication:
Fast analytical model of MZI micro-opto-mechanical pressure sensor
Date
2018
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rochus, Veronique
;
Jansen, Roelof
;
Goyvaerts, Jeroen
;
Neutens, Pieter
;
O'Callaghan, John
;
Rottenberg, Xavier
Journal
Journal of Micromechanics and Microengineering
Abstract
Description
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Views
1998
since deposited on 2021-10-26
Acq. date: 2025-10-27
Citations
Metrics
Views
1998
since deposited on 2021-10-26
Acq. date: 2025-10-27
Citations