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Fast analytical model of MZI micro-opto-mechanical pressure sensor

dc.contributor.authorRochus, Veronique
dc.contributor.authorJansen, Roelof
dc.contributor.authorGoyvaerts, Jeroen
dc.contributor.authorNeutens, Pieter
dc.contributor.authorO'Callaghan, John
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-26T02:36:33Z
dc.date.available2021-10-26T02:36:33Z
dc.date.issued2018
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31663
dc.sourceIIOimport
dc.titleFast analytical model of MZI micro-opto-mechanical pressure sensor
dc.typeJournal article
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorGoyvaerts, Jeroen
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.imecauthorO'Callaghan, John
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.source.peerreviewyes
dc.source.beginpage64003
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue6
dc.source.volume28
dc.identifier.urlhttp://iopscience.iop.org/article/10.1088/1361-6439/aab461/pdf
imec.availabilityPublished - imec


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