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Investigation of morphology and boron incorporation in heavily p-type CVD diamond film growth

dc.contributor.authorRouzbahani, Rozita
dc.contributor.authorNicley, Shannon
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-26T02:51:59Z
dc.date.available2021-10-26T02:51:59Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31687
dc.sourceIIOimport
dc.titleInvestigation of morphology and boron incorporation in heavily p-type CVD diamond film growth
dc.typeOral presentation
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceHasselt Diamond Workshop - SBDD XXIII
dc.source.conferencedate7/03/2018
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec


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