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Setting up a proper power spectral density (PSD) and autocorrelation analysis for material and process characterization

dc.contributor.authorRutigliani, Vito
dc.contributor.authorLorusso, Gian
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorRispens, Gijsbert
dc.contributor.authorPapavieros, George
dc.contributor.authorGogolides, Evangelos
dc.contributor.authorCostantoudis, Vassilios
dc.contributor.authorMack, Chris
dc.date.accessioned2021-10-26T02:55:48Z
dc.date.available2021-10-26T02:55:48Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31693
dc.sourceIIOimport
dc.titleSetting up a proper power spectral density (PSD) and autocorrelation analysis for material and process characterization
dc.typeProceedings paper
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorRispens, Gijsbert
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage105851K
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXXII
dc.source.conferencedate25/02/2018
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2297264
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 10585


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