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The fabrication and reliability of a photovia test vehicle for MCM-L applciations

dc.contributor.authorZhang, S.
dc.contributor.authorVereeken, Maria
dc.contributor.authorDe Baets, J.
dc.contributor.authorVan Calster, Andre
dc.date.accessioned2021-10-01T09:52:38Z
dc.date.available2021-10-01T09:52:38Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3170
dc.sourceIIOimport
dc.titleThe fabrication and reliability of a photovia test vehicle for MCM-L applciations
dc.typeProceedings paper
dc.contributor.imecauthorVan Calster, Andre
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage53
dc.source.endpage58
dc.source.conferenceProceedings IMAPS International Symposium on Microelectronics
dc.source.conferencedate1/11/1998
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access


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