The realisation of photo-via technology using multiposit as a photo imageable dielectric
dc.contributor.author | Zhang, S. | |
dc.contributor.author | Vereeken, Maria | |
dc.contributor.author | De Baets, J. | |
dc.contributor.author | Van Calster, Andre | |
dc.contributor.author | Peeters, Joris | |
dc.contributor.author | Allaert, K. | |
dc.date.accessioned | 2021-10-01T09:52:56Z | |
dc.date.available | 2021-10-01T09:52:56Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3171 | |
dc.source | IIOimport | |
dc.title | The realisation of photo-via technology using multiposit as a photo imageable dielectric | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Van Calster, Andre | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 62 | |
dc.source.endpage | 65 | |
dc.source.conference | Proceedings of the 3rd European Conference on Electronic Packaging Technology and 9th International Conference on Interconnectio | |
dc.source.conferencedate | 15/06/1998 | |
dc.source.conferencelocation | Nuremberg Germany | |
imec.availability | Published - open access | |
imec.internalnotes | DVS berichte; Vol. 191 |