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Non-destructive characterization of extended crystalline defects in confined semiconductor device structures

dc.contributor.authorSchulze, Andreas
dc.contributor.authorStrakos, Libor
dc.contributor.authorVystavel, Tomas
dc.contributor.authorLoo, Roger
dc.contributor.authorPacco, Antoine
dc.contributor.authorCollaert, Nadine
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-26T03:32:44Z
dc.date.available2021-10-26T03:32:44Z
dc.date.issued2018
dc.identifier.issn2040-3364
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31749
dc.sourceIIOimport
dc.titleNon-destructive characterization of extended crystalline defects in confined semiconductor device structures
dc.typeJournal article
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewyes
dc.source.beginpage7058
dc.source.endpage7066
dc.source.journalNanoscale
dc.source.issue15
dc.source.volume10
dc.identifier.urlhttp://pubs.rsc.org/en/content/articlelanding/2018/nr/c8nr00186c#!divAbstract
imec.availabilityPublished - imec


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