Authors

Schulze, Andreas; Strakos, Libor; Vystavel, Tomas; Loo, Roger; Pacco, Antoine; Collaert, Nadine; Vandervorst, Wilfried; Caymax, Matty

ISSN

2040-3364

Issue

15

Journal

Nanoscale

Volume

10

Title

Non-destructive characterization of extended crystalline defects in confined semiconductor device structures

Publication type

Journal article