Non-destructive characterization of extended crystalline defects in confined semiconductor device structures

dc.contributor.author	Schulze, Andreas
dc.contributor.author	Strakos, Libor
dc.contributor.author	Vystavel, Tomas
dc.contributor.author	Loo, Roger
dc.contributor.author	Pacco, Antoine
dc.contributor.author	Collaert, Nadine
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.author	Caymax, Matty
dc.contributor.imecauthor	Loo, Roger
dc.contributor.imecauthor	Pacco, Antoine
dc.contributor.imecauthor	Collaert, Nadine
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.imecauthor	Caymax, Matty
dc.contributor.orcidimec	Loo, Roger::0000-0003-3513-6058
dc.contributor.orcidimec	Collaert, Nadine::0000-0002-8062-3165
dc.date.accessioned	2021-10-26T03:32:44Z
dc.date.available	2021-10-26T03:32:44Z
dc.date.issued	2018
dc.identifier.issn	2040-3364
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/31749
dc.identifier.url	http://pubs.rsc.org/en/content/articlelanding/2018/nr/c8nr00186c#!divAbstract
dc.source.beginpage	7058
dc.source.endpage	7066
dc.source.issue	15
dc.source.journal	Nanoscale
dc.source.volume	10
dc.title	Non-destructive characterization of extended crystalline defects in confined semiconductor device structures
dc.type	Journal article
dspace.entity.type	Publication
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