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Vacuum-ultraviolet-radiation damage of low-k dielectrics

dc.contributor.authorShohet, J. Leon
dc.contributor.authorKim, Sang-Heum
dc.contributor.authorNguyen, Ha
dc.contributor.authorXue, Panpan
dc.contributor.authorBlatz, Joshua
dc.contributor.authorCheng, Haoyu
dc.contributor.authorLin, Yi-Hung
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorRedzheb, Murad
dc.contributor.authorArmini, Silvia
dc.contributor.authorChen, Cheng-chi
dc.contributor.authorWu, Yuting
dc.date.accessioned2021-10-26T03:47:12Z
dc.date.available2021-10-26T03:47:12Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31772
dc.sourceIIOimport
dc.titleVacuum-ultraviolet-radiation damage of low-k dielectrics
dc.typeMeeting abstract
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.beginpagePS-TuP22
dc.source.conferenceAVS Meeting & Exhibition 2018
dc.source.conferencedate26/10/2018
dc.source.conferencelocationLong Beach, CA USA
dc.identifier.urlhttps://www2.avs.org/symposium2018/Papers/Paper_PS-TuP22.html
imec.availabilityPublished - imec


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