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Metal contamination in semiconductor devices: a never ending story?

dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-26T03:53:26Z
dc.date.available2021-10-26T03:53:26Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31782
dc.sourceIIOimport
dc.titleMetal contamination in semiconductor devices: a never ending story?
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewyes
dc.source.beginpage51
dc.source.endpage69
dc.source.conference8th Forum on the Science and Technology of Silicon Materials
dc.source.conferencedate18/11/2018
dc.source.conferencelocationOkayama Japan
imec.availabilityPublished - imec


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