Authors

Simoen, Eddy; Sivaramakrishnan Radhakrishnan, Hariharsudan; Uddin, MD Gius; Gordon, Ivan; Poortmans, Jef; Wang, Chong; Li, Wei

ISSN

1071-1023

Issue

4

Journal

Journal of Vacuum Science and Technology B

Volume

36

Title

Dry etch damage in n-type crystalline silicon wafers assessed by Deep-Level Transient Spectroscopy

Publication type

Journal article