dc.contributor.author | Spampinato, Valentina | |
dc.contributor.author | Dialameh, Masoud | |
dc.contributor.author | Fleischmann, Claudia | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | van der Heide, Paul | |
dc.date.accessioned | 2021-10-26T04:28:32Z | |
dc.date.available | 2021-10-26T04:28:32Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31836 | |
dc.source | IIOimport | |
dc.title | Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Spampinato, Valentina | |
dc.contributor.imecauthor | Dialameh, Masoud | |
dc.contributor.imecauthor | Fleischmann, Claudia | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | van der Heide, Paul | |
dc.contributor.orcidimec | Spampinato, Valentina::0000-0003-3225-6740 | |
dc.contributor.orcidimec | Dialameh, Masoud::0000-0002-1439-590X | |
dc.contributor.orcidimec | Fleischmann, Claudia::0000-0003-1531-6916 | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.contributor.orcidimec | van der Heide, Paul::0000-0001-6292-0329 | |
dc.source.peerreview | no | |
dc.source.conference | SIMS Europe 2018 | |
dc.source.conferencedate | 17/09/2018 | |
dc.source.conferencelocation | Münster Germany | |
imec.availability | Published - imec | |