Anomalous C-V inversion in TSV's: The problem and its cure

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Authors

Stucchi, Michele; De Vos, Joeri; Jourdain, Anne; Li, Yunlong; Van der Plas, Geert; Croes, Kristof; Beyne, Eric

ISSN

0018-9383

Issue

4

Journal

IEEE Transactions on Electron Devices

Volume

65

Title

Anomalous C-V inversion in TSV's: The problem and its cure

Publication type

Journal article

Embargo date

9999-12-31

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